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Calculation of a diffraction corrector to control free-form surfaces

Authors: Krasnov D.I.
Published in issue: #8(73)/2022
DOI: 10.18698/2541-8009-2022-8-819


Category: Instrument Engineering, Metrology, Information-Measuring Instruments and Systems | Chapter: Laser and opto-electronic systems

Keywords: interference control, autocollimation branch, diffraction element, wavefront corrector, phase profile, free-form surface, interferometer, numerical methods
Published: 07.10.2022

A review of the autocollimation measuring branch of the interferometer to control free-form surfaces using a diffracted optical element as a wavefront corrector is presented. An algorithm for calculating the phase profile of a diffractive optical element and an algorithm for determining the coordinates of its zones required for fabrication are developed and adapted. As an example, the calculation of a diffractive element to control a free-form mirror, the deformation of which is described by the sum of Zernike polynomials, is carried out. The proposed method of control allows the certification of any concave surfaces, and with the use of auxiliary elements - any convex surfaces. For correct installation of the corrector in the working position, the auxiliary diffraction elements on the substrate periphery are provided.


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